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but can be of any geometrical shape as specified
pin configurations
and procedures are referred to in the individual test methods
Use of contrast to characterize polarizers is encouraged because it is an intrinsic property of the polarizer
E19500 - SEMI E195 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components Revision:SEMI E195-0925 - Current but can be of any1 Purpose 1. 1 This Test Method describes a quantitative analysis method to measure the ISO 14644 9 surface cleanliness for particle concentration (SCP) of a critical chamber component (CCC) by means of an adhesive replacement substrate (ARS), which removes particles from the CCC surfaces of interest. The ARS is subsequently measured with a scanning surface inspection system (SSIS), typically a scatterometer, for particle counting, and with scanning
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